Review

    Design and Optimization of Epitaxial and Chip Structures in AlGaN-Based Deep-Ultraviolet LEDs: Toward Enhanced Efficiency and Reliability
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    • Yifang Chen
      Yifang Chen
      School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China
      More by Yifang Chen
    • Quanjiang Lv*
      Quanjiang Lv
      School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China
      *[email protected]
      More by Quanjiang Lv
    • Tianpeng Yang
      Tianpeng Yang
      EpiTop Optoelectronic Co., Ltd, Ma’anshan 243000, China
      Ma’anshan Jason Semiconductor Co., Ltd, Ma’anshan 243000, China
    • Tingting Mi
      Tingting Mi
      Ma’anshan Jason Semiconductor Co., Ltd, Ma’anshan 243000, China
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    • Xiaowen Wang
      Xiaowen Wang
      Ma’anshan Jason Semiconductor Co., Ltd, Ma’anshan 243000, China
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    • Junlin Liu*
      Junlin Liu
      School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China
      *[email protected]
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    ACS Photonics

    Cite this: ACS Photonics 2026, 13, 4, 878–912
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    https://doi.org/10.1021/acsphotonics.5c02187
    Published February 4, 2026
    Copyright © 2026 American Chemical Society

    Abstract

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    AlGaN-based deep-ultraviolet light-emitting diodes (DUV LEDs) demonstrate significant application potential and a broad market prospect in fields such as sterilization, disinfection, optical communication, sensing, agriculture, and food processing. These devices offer distinct advantages, including eco-friendliness, nontoxicity, low energy consumption, and tunable emission wavelengths. Over the past two decades, sustained research and development efforts have led to considerable improvements in luminous efficiency and device lifetime, advancing AlGaN-based DUV LEDs toward commercialization. Nevertheless, their overall performance still lags behind that of fully commercialized GaN-based blue LEDs, indicating ample room for further enhancement. This review begins with an overview of the current development status of AlGaN-based DUV LEDs and examines key methodologies for improving device performance. It then systematically summarizes recent research advances and optimization strategies, focusing on two critical areas: material epitaxial growth and chip structural design. Finally, it discusses current technical challenges and outlines future development opportunities in the field.

    Copyright © 2026 American Chemical Society

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    ACS Photonics

    Cite this: ACS Photonics 2026, 13, 4, 878–912
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsphotonics.5c02187
    Published February 4, 2026
    Copyright © 2026 American Chemical Society

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